Sources of AMC – Contributions![](https://www.nano-tech.com.tw/img/hxnw_img1.jpg) |
> 50% of AMC (Airborne Molecular Contamination) are from process in origin |
> 70% of AMC in mass content in clean room air are from processes & material outgassing |
![](https://www.nano-tech.com.tw/img/hxnw_img3.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img4.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img5.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img6.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img7.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img8.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img9.jpg)
Mission – Systems for Contamination Control![](https://www.nano-tech.com.tw/img/hxnw_img1.jpg) |
● Facility Concepts / Rooms |
● Tools & Storage units |
![](https://www.nano-tech.com.tw/img/hxnw_img19.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img20.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img21.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img22.jpg) |
IC2PTM – Integral Contamination Control Process![](https://www.nano-tech.com.tw/img/hxnw_img1.jpg) |
● Contamination can be described as chain of sources & measures |
● Quantified performance leads to quantified results & AMC levels |
● IC2P results in lowest TCO (Total Cost of Ownership) |
![](https://www.nano-tech.com.tw/img/hxnw_img23.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img24.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img25.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img26.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img27.jpg) ![](https://www.nano-tech.com.tw/img/hxnw_img28.jpg) |
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