Sources of AMC – Contributions |
> 50% of AMC (Airborne Molecular Contamination) are from process in origin |
> 70% of AMC in mass content in clean room air are from processes & material outgassing |
Mission – Systems for Contamination Control |
● Facility Concepts / Rooms |
● Tools & Storage units |
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IC2PTM – Integral Contamination Control Process |
● Contamination can be described as chain of sources & measures |
● Quantified performance leads to quantified results & AMC levels |
● IC2P results in lowest TCO (Total Cost of Ownership) |
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